Nano fabrication and prototyping applications and customising nanotools using FIB.
University of Bath Nano-Imprint master machined into a Gold substrate.
Direct Ion Beam Nano-fabrication
Ion Beams lend themselves immediately to nano-machining applications. The ability to directly inspect or prepare high resolution TEM sections for analysing nano-structures is already a well know capability of FIB and FIB-SEM instruments.
Beyond this the ability to deposit electrical connections to any tiny structure from piezo probes to carbon nano-tubes, or trim nano-structures to optimise their novel behaviours can be achieved in very short time lines. From nano-imprint masters for holography to nano-pore machining for DNA molecule filtering, FIB as a nano-fabrication technique is an essential tool for the nano-researcher.
The Clifton Suspension Bridge machined by FIB into a Gold bondwire just 13 microns in diameter – 1/6th as thick as a human hair.
Enabling toolsets for advanced MEMS development
Probes and tips for AFM, SPM, micro-indenters, electrical probing, SNOM and nano-manipulation may be customised using FIB in just a few minutes. FIB can quickly customise the profile of AFM tips from a wide variety of materials – from Silicon to Diamond, with novel forms such as hammer heads or super-sharp tips which can be used to support specific project requirements.
Form and function and even the chemical coating of many probe variants may be customised to compliment your process. Serving the European market since 1994, the engineers at NanoScope offer extensive experience both with existing MEMS applications, and rapid new process development.
A multi-walled carbon nano-tube with an Ion Beam deposited 4 point probe measurement electrode added.
Or if you want to image the surface instead of modify it
For AFM service information
FIB machined Diamond super-tip – 20nm radius
Multiple FIB modified nano-tip images including an atom probe, a nano-indenter, a SNOM tip and a Piezoelectric tip with ion beam deposited electrical connections added.
NanoScope engineers have been applying FIB to nano-structures to enable and accelerate nano-research for over a decade, and we’re happy to provide a candid assessment of the applicability of FIB to assist your project, and to help you deliver results in a shorter time frame.
Call us for ‘off the shelf’ Nano-Surgery, when you need it.
“Having developed a good working relationship with NanoScope services. IQE have always found the service friendly, reliable, responsive and professional. The NanoScope team are always willing to work through any special customer requirements. IQE have found it extremely useful being able to call on this wealth of specialist knowledge.”
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If you are interested to work with us or just have a question
NanoScope has been successful in acquiring much of the FA capability of the Unisem facility and we are now in the process of transferring this equipment over to our Bristol Laboratory.
Here I discuss why the growth in MEMS development is lagging the growth that was witnessed for IC development in many respects – but highlighting that there are valuable lessons available to accelerate future growth too.
What’s new for FIB heads? Well this example shows a high precision, fully automated, large pattern FIB milling operation, being used to directly fabricate a working Fresnel Zone Plate lens.