MEMS Process Engineers
'3D Structural Analysis’ of MEMS structures using FIB solves construction issues.
Understanding the cause of process or functional failures requires the application of various microscopy techniques to site specific locations.
Whether your needs are simple metrology or a more detailed high resolution analysis, both can be delivered from the required location using the nano-sectioning capabilities of FIB. Applying SIM, SEM and TEM, all enabled with FIB, we can help you understand your device structure and any failure modes.
NanoScope’s fast turn-around ‘off the shelf’ expert service, makes this available at every level of MEMS development.
FIBxTEM section preparation from MEMS ‘cog’ (foil width ~20um)
Waveguide metrology – within a FIB milled section (result time 20 mins)