Nano Zone

Nano fabrication and prototyping applications and customising nanotools using FIB.


University of Bath Nano-Imprint master machined into a Gold substrate.

Direct Ion Beam Nano-fabrication

Ion Beams lend themselves immediately to nano-machining applications. The ability to directly inspect or prepare high resolution TEM sections for analysing nano-structures is already a well know capability of FIB and FIB-SEM instruments.

Beyond this the ability to deposit electrical connections to any tiny structure from piezo probes to carbon nano-tubes, or trim nano-structures to optimise their novel behaviours can be achieved in very short time lines. From nano-imprint masters for holography to nano-pore machining for DNA molecule filtering, FIB as a nano-fabrication technique is an essential tool for the nano-researcher.


The Clifton Suspension Bridge machined by FIB into a Gold bondwire just 13 microns in diameter – 1/6th as thick as a human hair.


Enabling toolsets for advanced MEMS development

Probes and tips for AFM, SPM, micro-indenters, electrical probing, SNOM and nano-manipulation may be customised using FIB in just a few minutes. FIB can quickly customise the profile of AFM tips from a wide variety of materials – from Silicon to Diamond, with novel forms such as hammer heads or super-sharp tips which can be used to support specific project requirements.

Form and function and even the chemical coating of many probe variants may be customised to compliment your process. Serving the European market since 1994, the engineers at NanoScope offer extensive experience both with existing MEMS applications, and rapid new process development.


A multi-walled carbon nano-tube with an Ion Beam deposited 4 point probe measurement electrode added.

Or if you want to image the surface instead of modify it

For AFM service information

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FIB machined Diamond super-tip – 20nm radius

Multiple FIB modified nano-tip images including an atom probe, a nano-indenter, a SNOM tip and a Piezoelectric tip with ion beam deposited electrical connections added.

NanoScope engineers have been applying FIB to nano-structures to enable and accelerate nano-research for over a decade, and we’re happy to provide a candid assessment of the applicability of FIB to assist your project, and to help you deliver results in a shorter time frame.


Call us for ‘off the shelf’ Nano-Surgery, when you need it.

“Having developed a good working relationship with NanoScope services. IQE have always found the service friendly, reliable, responsive and professional. The NanoScope team are always willing to work through any special customer requirements. IQE have found it extremely useful being able to call on this wealth of specialist knowledge.”

IQE Europe Ltd

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How do I get the most benefit from FIB IC Nano-surgery? (a.k.a. Circuit Edit, a Metal Fix, a FIB, Cut and Paste) Nov 2020

There are many advantages of correcting an IC design with FIB Nano-Surgery, but sometimes there are also problems, and many designers have been put off the technique. Did your last FIB work as you expected? Or was the yield low? or you got results you couldn’t explain? A quick recap of the reasons to do a FIB edit and how you would go about it, might be helpful. SCENE: So you’ve taped out your big new design, and 4 months and ₤400,000 /$/€ later, your 1st Silicon devices have arrived for tests to start. And immediately, there’s a problem. If you are lucky, then a normal functional test has failed and after a few days of head scratching it becomes clear what the cause is, and what the most likely metal fix should be. If you are unlucky and it’s more subtle, but still a show stopper for customer acceptance, then the fix strategy may be less obvious. Either way, prompt action is required and there are some difficult decisions to make. Your colleagues, customers and suppliers are all waiting to help get your product to market. Then there is the expense and the delays: to testing, to qualification, to sales and to revenue – which all add up to a serious commercial inconvenience. What ARE your options here? Risk a design change because there is a high confidence that the fix is understood? Do you roll the dice (the expensive and time consuming ones) and trust that the fix will work? Or spend a week trying to get a few chips fixed using FIB nano-surgery and give yourself some...

E-Newsletter Summer 2019

Here are some examples of our new services, and how they complement our existing imaging and non-destructive analysis. There is a quick guide to the specific advantages of each technique to show how your FA, NPI or development project can benefit.

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