FIB TEM Ex-Situ Lift Out Solution from NanoScope

A high quality, low cost ex-situ solution for every FIB and FIB-SEM lab.

Our ‘ex-situ’ lift-out solution

This FIB TEM ex-situ lift out solution combines an optical microscope with extra long working distance lenses and precision hydraulic nano-manipulation, for the routine extraction of FIBxTEM sections from bulk samples to TEM grids.

This high quality British constructed and guaranteed optical microscope has been configured by NanoScope engineers to provide the best solution for this FIB application.  Click HERE to receive your PDF brochure.

FIB TEM ex-situ lift out solution EXLO

The distinctive features of the FIB TEM ex-situ lift out solution are:

  • Extra long working distance objectives
  • Integrated dual illumination system
  • Extreme depth travel mechanical stage
  • Bespoke objective turret configuration
  • High precision hydraulic nano-manipulator
  • Nanoprobe puller
  • Camera and webcam options
  • High yield protocols
  • Most comprehensive configuration available
  • Most economical solution available

‘Ex-situ’ TEM section lift-out has many advantages over ‘in-situ’ section lift out.

  • It works on a much wider variety of materials
  • It has a high success rate
  • It is much faster
  • It requires no beam time (benchtop not in-situ)
  • It is more cost effective
  • The optical microscope can be used for other applications.

Best value solution

The FIB TEM ex-situ lift out solution (EXLO) is available for 1/3rd of the price of some other systems and offers the best configuration for FIBxTEM lift-out.

Our ECO-configuration
₤19,650+VAT

Our Full-configuration
₤24,650+VAT

Your configuration – contact us for the options list

The illumination system is bespoke and has an integrated 6v, 30 watt quartz halogen incident illumination system with rheostat brightness control and iris diaphragm with lateral movement adjusters. The incident illumination can be either plain or polarised. Also integrated is a rheostat controlled, dual goose neck LED cold lighting system that can illuminate the specimen from any angle (independently from the standard pathway). The two lighting systems can be used seperately or together at any illumination ratio, and are particularly useful for non metal opaque specimens that are not particularly reflective. This combination enables the user to quickly locate FIB milled trenches on samples with complex surface morphology and reflective characteristics.

The microscope is based on an industrial standard metallurgical trinocular microscope with a particularly large specimen stage. Finished in beige enamel with a superior build quality.

The trinocular head allows full illumination to the binocular eyetubes or to the trinocular tube for digital photography. Full interocular and dioptric adjustment with x10 wide field eyepieces.

The stage has been customised to enable the use of the long working distance lenses and to permit the highest possible angle of access for the nano-manipulator and incident light for optimised lift-out.

Not right?

If you prefer to do our lift-out inside your FIB

Go to in-situ liftout solution

The objective lenses are the latest evolution of high quality lens technology and provide the industries longest working distances. Lenses may be supplied as infinity corrected, bright field or NIR compatible with magnifications of 5X, 10X, 20X, 50X and 100X. For our ‘Eco Configuration’ we offer these three lenses:

M Plan Apo HL x5 (n.a. 0.14). Infinity corrected. Working distance = 45.0 mm’s.

M Plan Apo L x10 (n.a. 0.28). Infinity corrected. Working distance = 34.0 mm’s.

M Plan Apo SL x50 (n.a. 0.42). Infinity corrected. Working distance = 20.5 mm’s.

The Nano-manipulator is an industry standard unit used for high precision work and may be adjusted for sensitivity by the user. It combines a coarse 3 axis manual positioning system with a mechanically decoupled, precision 3 axis oil-hydraulic, joystick controlled positioning system. This configuration has been supplied for this application by NanoScope engineers since its launch.

The Nano-probe puller produces glass probes with a specific physical profile providing the mechanical behaviour necessary for optimised TEM section extraction.

Camera options include a high spec. Canon digital camera with movie options and dedicted PC software for image capture and manipulation (₤600). There is also a lower resolution streaming CCD camera option with PC software which can function as a webcam (₤300).

Sizes – the FIB TEM ex-situ lift out solution is also available with 200mm and 300mm microscope body and stage configurations.
Please contact NanoScope for more information at contact@nanoscopeservices.com

Quality – NanoScope engineers have been involved with the configuration, supply and daily commercial use of benchtop section lift-out systems since their introduction in 1998. The microscope supplied as part of the ex-situ liftout package contains all the latest enhancements for high success lift-out and for a fraction of the normal market price. We have accepted no compromise on any aspect of the quality of the instrument and it is constructed, supported and guaranteed by our UK optical microscopy partner.

High yield protocols – NanoScope has refined the technique of benchtop section lift-out and we offer additional dedicated training courses, on-site installation visits and also some free ‘tricks and tips’ to customers for helping to avoid the most common early learning pitfalls.

All you need – the FIB TEM lift out solution comes with all the necessary consumables needed to get started, including Agar TEM grids, glass pipettes for probe making, grid transport boxes for lifted sections,  security shipping bags and section location maps.

FIB TEM ex-situ lift out solution - lenses

Contact us to receive the full product brochure as a PDF

Click below

Ex-situ liftout brochure PDF

Merry Christmas 2023 – It’s been a Quality Year adding these exciting new Capabilities

Closure times – NanoScope is closed from 20th December 2023 to the 5th January 2024 Our big company NEWS is that we are now ISO 9001:2015 Certified In our bid to improve our services on all fronts, we are very proud to have achieved ISO 9001 certification at the end of 2023 – more details to follow. We have already implemented our Quality Management System so you may spot these changes when you use us next. Our NEW microscope this year is a Sonoscan D24 Acoustic Microscope (large area CSAM). this state-of-the-art CSAM is already providing pre- and post- JEDEC Reliability checks for stress testing batches of devices (inc MSL testing) its providing checks for voids in complex planar sandwiches of materials – like polymers and metals it is also used as a Failure Analysis diagnostic tool for on-board packaging as a compliment to our X-ray capability. Our New Technique this year is our Plasma FIB Capability. We can offer ThermoFisher Hydra capabilities to our customers now including Xe for rapid milling of large sections – up to 100’s of μm in size/depth Ar for low kV polishing of (S)TEM sections and FEG SEM for high resolution imaging and Analysis in-situ. Lastly our new Sample Preparation Technique is Mechanical Grinding and Polishing. As boards and modules get smaller and more complex, the boundary between substrate and die requires more advanced investigation, so the need for accurate mechanical sectioning as a starting point for any structural analysis becomes increasingly important. Good Mechanical prep is more often the starting point for a Plasma or Gallium FIB section. (Section of a Section...

European / Middle East Issue: Winter 2022

European / Middle East Issue: Winter 2022 A new IC design FIB Nano-surgery datapoint, our JEDEC MSL Rel-test services and Euros discount. Dear NanoScope Customer, greetings in our first email since COVID. For Silicon DESIGNERS we’ve got a new node success data point, for RELIABILITY Engineers there are new MSL testing services, for EU customers there is our 1€ = 1£ deal, plus NanoScope is growing. First FIB circuit nano-surgery fix to a 7nm node, from the FRONTSIDE.  Our unique expertise has allowed us to successfully modify this advanced 7nm process with 13 metal layers at the M2 level, from the front. The device die was then flipchip packaged and tested with a 65% yield. The benefit for the customer concerned was ‘invaluable’.  Watch out for the upcoming article on this story. Don’t forget to read our 1st article on ‘How to get the most benefit from IC Nano-Surgery” – part 2 coming soon. Launching our low cost MSL testing service for packaged parts for both R&D and production Reliability. All MSL testing is done to JEDEC standards, but now for the first time customers can choose to have a JEDEC CERTIFIED or an UNCERTIFIED test. R&D lots don’t require certification, so why not save 30% on your MSL trials of new packages? Loading a test lot for Temperature Humidity Bias testing (THB) New colleague – supporting accounts, logistics, orders, quality and billing We’re pleased to introduce Janine Stone, who is now managing project administration and compliance at NanoScope, adding much needed bandwidth for our technical offerings. Contact Janine here. Please welcome Janine Stone to the NanoScope team. We’re re-introducing our 1€ = 1£ exchange rate. To help our EU customers during this period of economic chaos, our 1:1 exchange rate adds clarity, security and a 16%...

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There are many advantages of correcting an IC design with FIB Nano-Surgery, but sometimes there are also problems, and many designers have been put off the technique. Did your last FIB work as you expected? Or was the yield low? or you got results you couldn’t explain? A quick recap of the reasons to do a FIB edit and how you would go about it, might be helpful. SCENE: So you’ve taped out your big new design, and 4 months and ₤400,000 /$/€ later, your 1st Silicon devices have arrived for tests to start. And immediately, there’s a problem. If you are lucky, then a normal functional test has failed and after a few days of head scratching it becomes clear what the cause is, and what the most likely metal fix should be. If you are unlucky and it’s more subtle, but still a show stopper for customer acceptance, then the fix strategy may be less obvious. Either way, prompt action is required and there are some difficult decisions to make. Your colleagues, customers and suppliers are all waiting to help get your product to market. Then there is the expense and the delays: to testing, to qualification, to sales and to revenue – which all add up to a serious commercial inconvenience. What ARE your options here? Risk a design change because there is a high confidence that the fix is understood? Do you roll the dice (the expensive and time consuming ones) and trust that the fix will work? Or spend a week trying to get a few chips fixed using FIB nano-surgery and give yourself some...
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