Services for MEMS Structual R&D
Structural Prototyping – direct nano-fabrication of structural prototypes and MEMS device design testing
Micro-Electrical- Mechanical-Structures (MEMS) device Design, Research & Development
The ‘dial up’ nano-Surgery capabilities of FIB offer a quick and low cost method of verifying simulation models or proof of concept for MEMS device design.
NanoScope offer these advanced nano-machining capabilities on an ‘as you need it, by the hour’ basis, making them easily and immediately available to support your MEMS project. Your engineering team now has immediate expert access to world-class results in MEMS device design testing from the most advanced toolsets available.
These examples show a waveguide which has undergone site specific 3D metrology, and also a simple SiN membrane which has been machined (proof mass added) into a cantilever (oscillator) to verify mathematical model precision.
Call NanoScope to discuss your MEMS device design development and how quickly and easily testable elements of it can be provided.
Membrane sculpting for Cantilever modelling (length15 μms)
MEMS dynamic modelling simulations can be quickly checked against their physical counterparts for accuracy.
NanoScope gave an Online invited Tutorial on behalf of IMAPS UK on the 18th September on the subject of Focused Ion Beam (FIB) Circuit Nano-Surgery and Failure Analysis from Board to Gate.read more
Here are some examples of our new services, and how they complement our existing imaging and non-destructive analysis. There is a quick guide to the specific advantages of each technique to show how your FA, NPI or development project can benefit.read more
IC Decap, MEMS Gel coat removal and through WL-CSP modification capabilities available nowread more
NanoScope has brought Dual-Acid decapsulation in-house, and extended those capabilities.
This equipment was part of a larger equipment acquisition and more FA and other capabilities will become available over the next few weeks.
NanoScope has been successful in acquiring much of the FA capability of the Unisem facility and we are now in the process of transferring this equipment over to our Bristol Laboratory.read more
Here I discuss why the growth in MEMS development is lagging the growth that was witnessed for IC development in many respects – but highlighting that there are valuable lessons available to accelerate future growth too.read more