Services for MEMS Structual R&D
Structural Prototyping – direct nano-fabrication of structural prototypes and MEMS device design testing
Micro-Electrical- Mechanical-Structures (MEMS) device Design, Research & Development
The ‘dial up’ nano-Surgery capabilities of FIB offer a quick and low cost method of verifying simulation models or proof of concept for MEMS device design.
NanoScope offer these advanced nano-machining capabilities on an ‘as you need it, by the hour’ basis, making them easily and immediately available to support your MEMS project. Your engineering team now has immediate expert access to world-class results in MEMS device design testing from the most advanced toolsets available.
These examples show a waveguide which has undergone site specific 3D metrology, and also a simple SiN membrane which has been machined (proof mass added) into a cantilever (oscillator) to verify mathematical model precision.
Call NanoScope to discuss your MEMS device design development and how quickly and easily testable elements of it can be provided.
Membrane sculpting for Cantilever modelling (length15 μms)
MEMS dynamic modelling simulations can be quickly checked against their physical counterparts for accuracy.
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